Tài liệu Màng mỏng cấu trúc nano cho thiết bị cảm biến. Tổng hợp, tính chất và ứng dụng

Sensor Design Guidelines 1
Anis Zribi
2 Transduction Principles . 17
Jeffrey Fortin
3 Growth and Synthesis of Nanostructured Thin Films . 31
Yiping Zhao
4 Integrated Micromachining Technologies
for Transducer Fabrication . 65
Wei Cheng Tian
5 Applications of Functional Thin Films
and Nanostructures in Gas Sensing . 85
Audrey Nelson
6 Chemical Sensors: New Ideas for the Mature Field . 103
Radislav A. Potyrailo
7 Applications of Functional Thin Films for Mechanical Sensing . 145
Chang Liu
8 Sensing Infrared and Terahertz Regions by Functional Films . 167
Magnus Willander, Victor Ryzhii, and Qingxiang Zhao
Index 211