Báo Cáo Digital accelerometer with feedback control using sigma delta modulation

Digital accelerometer with feedback control using sigma delta modulationThis paper describes a digital accelerometer implemented in a bulk micromachining technology.
The accelerometer measures changes in a differential capacitance to detect deflections of a proof mass,
which result from acceleration input. The differential capacitance is connected to position sense
interface whose output is used for one bit force feedback. The heart of the feedback system is sigma
delta modulation or over-sampling technique, which includes direct digital output signal and noise
shaping properties. Open loop sensors are fabricated at ITIMS and the feedback system is designed in
MATLAB.