Thạc Sĩ 2D and 3D Terahertz Metamaterials: Design, Fabrication and Characterization

II

Table of Contents

Acknowledgements I
Table of Contents . II
Summary VI
List of Figures . VIII
List of Table XIII
List of Publications XIV
Chapter 1 Introduction . 1
1.1 Background 1
1.2 Literature reviews 3
1.3 Research motivation . 8
1.4 Organization of thesis 10
References 13
Chapter 2 Physics on Terahertz Metamaterials 18
2.1 Definition of metamaterials . 18
2.2 Dispersive permittivity and permeability . 19
2.3 Resonance properties of metamaterials 22 III

2.4 Response saturation of split ring resonators 25
References 28
Chapter 3 Experiment 29
3.1 Introduction 29
3.2 Sample preparation 29
3.3 Laser micro-lens array (MLA) lithography . 31
3.4 Metal film deposition and lift-off . 34
3.5 Optical microscope 37
3.6 Scanning electron microscopy . 37
3.7 Terahertz time domain spectroscopy . 40
References 43
Chapter 4 Fabrication of Terahertz Wire-grid Polarizers and Polarization Dependent Loss
Characterization of Terahertz Metamaterials . 44
4.1 Fabrication of high performance terahertz polarizers 44
4.2 Fabrication of terahertz metamaterials and polarization dependent loss
characterization 53
4.3 Summary 62
References 64 IV

Chapter 5 2D Tunable and Broadband Terahertz Metamaterials: Design, Fabrication, and
Characterization . 66
5.1 Structurally tunable metamaterials . 66
5.2 2D hybrid terahertz metamaterials . 73
5.3 Summary 83
References 85
Chapter 6 3D Multi-layer Metamaterials: Design, Fabrication, and Characterization . 87
6.1 Resonance enhancement by uniform multi-layer terahertz metamaterials 87
6.2 Broadband resonance by hybrid multi-layer terahertz metamaterials . 97
6.3 Summary 109
References 111
Chapter 7 3D Terahertz Metamaterials Tube: Design, Fabrication, and Characterization
113
7.1 Actively and passively tunable metamaterials . 113
7.2 Metamaterials tube . 115
7.3 Materials identification by metamaterials tube 123
7.4 Summary 127
References 129
Chapter 8 Conclusions and Future Work 130 8.1 Conclusions 130
8.2 Future work 133